IBM Acquires ARGUS Semiconductor Software From INFICON

IBM Acquires ARGUS Semiconductor Software From INFICON

IBM today announced that it has acquired INFICON’s ARGUS® semiconductor software and related intellectual property, a leading system for lithography advanced process control for semiconductor manufacturing. Advanced process control capability is an area that is becoming increasingly important for clients, as they look for ways to implement real-time capabilities, collaborate using best of breed technologies, and lower manufacturing costs in the process of semiconductor manufacturing. Financial terms of the acquisition were not disclosed.

INFICON’s ARGUS software is an advanced process control system used to control the lithography process for semiconductor manufacturing. The software provides users with real-time run-to-run capability to control processes using measurement results from upstream and downstream processes, which can help to improve process yield, reduce lithography rework and improve the production ramp up.

“This acquisition further expands and strengthens our portfolio of factory process control solutions,” said Joseph Nemeth, Vice President of Semiconductor Industry, IBM Engineering & Technology Services. “We see the ARGUS product as providing a critical solution to the semiconductor industry in both lithography development and early prototype manufacturing and it will be a true asset to our clients.”

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