IEDM CONFERENCE – SAN FRANCISCO, CALIFORNIA – December 15, 2008 – At
today’s IEEE International Electron Devices Meeting, IMEC presented a
monolithically integrated 11-megapixel micro-mirror array for high-end
industrial applications — a world’s first both in terms of pixel density
and reliability. Each mirror in the array is 8µm x 8µm and can be
individually tilted by the high-speed [...]